| 摘要 |
The present invention provides: a highly productive electroacoustic conversion film with which it is possible to appropriately convert vibration and voltage without causing air breakdown between upper and lower thin-film electrodes even when a high voltage is applied, and to prevent a user from touching a piezoelectric layer; and a method for manufacturing the electroacoustic conversion film. This electroacoustic conversion film has a piezoelectric layer that expands and contracts in accordance with the state of an electric field, an upper thin-film electrode formed on one principal surface of the piezoelectric layer, a lower thin-film electrode formed on the other principal surface of the piezoelectric layer, an upper protective layer formed on top of the upper thin-film electrode, and a lower protective layer formed on top of the lower thin-film electrode. A groove is formed in at least a surface portion at the outer periphery of the upper thin-film electrode and upper protective layer and/or the lower thin-film electrode and lower protective layer, the groove penetrating the thin-film electrode and protective layer. |
