发明名称 ULTRAVIOLET CLEANING DEVICE OF GLASS SUBSTRATE
摘要 An ultraviolet cleaning device of a glass substrate comprises: a lamp box (1), an ultraviolet lamp (2) arranged above within the lamp box (1), a transparent shield (3) arranged below the ultraviolet lamp (2), a humidifier (4) arranged below the transparent shield (3), and an intensive air exhaust device (5) arranged below the transparent shield (3) and also opposite the humidifier (4). When the ultraviolet cleaning device is in use, a glass substrate (6) is delivered into the lamp box (1), ultraviolet light emitted by the ultraviolet lamp (2) runs through the shield (3) to irradiate and thus clean the glass substrate (6); humidity and oxygen content in the lamp box (1) are adjusted through the humidifier (4) so that a layer of water molecules are adsorbed to the surface of the glass substrate (6), electrons that are generated during dry cleaning with ultraviolet light can be gradually conducted and leaked through the water molecules, so accumulation of static electricity can be effectively suppressed and the phenomenon of damages caused by static electricity can be alleviated; meanwhile, an increase in oxygen content leads to the increased concentration of active oxygen atoms within the lamp box (1), which consequently improves the effect of ultraviolet cleaning for organic matters.
申请公布号 WO2016197426(A1) 申请公布日期 2016.12.15
申请号 WO2015CN83067 申请日期 2015.07.01
申请人 SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. 发明人 YAO, Jiangbo
分类号 B08B11/00;B08B7/00 主分类号 B08B11/00
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