发明名称 Laser apparatus, exposure apparatus and method
摘要 A laser apparatus that emits a laser beam by exciting gas enclosed in a chamber, includes a gas characteristic detecting mechanism for detecting a characteristic of the gas in the chamber, and a calculation mechanism for calculating an oscillation wavelength and/or a wavelength spectral bandwidth of the laser beam based on a detected result by the gas characteristic detecting mechanism. <IMAGE>
申请公布号 EP1335460(A3) 申请公布日期 2005.07.06
申请号 EP20030250470 申请日期 2003.01.27
申请人 CANON KABUSHIKI KAISHA 发明人 NAGAI, YOSHIYUKI
分类号 H01S3/13;H01S3/134;H01S3/225;(IPC1-7):H01S3/225;G03F7/20;H01L21/30 主分类号 H01S3/13
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