A TOOL FOR STRETCHING THE FOIL OF A FOIL CARRIER, A MACHINE FOR REMOVING DIES FROM A WAFER AND A METHOD FOR REMOVING DIES

摘要

The present invention relates to a tool for stretching the foil (2) of a foil carrier (1), the foil being connected to a frame (3), which tool comprises a circular inner body (6) and a circular outer body (7), the foil being stretched by supporting the frame with at least one body and moving one body with respect to the other body in axial direction, the inner body extending in the outer body, wherein coupling means (10) are provided, which couples during a rotational movement from one body in relation to the other, and which converts this rotational movement into the required axial movement stretching the foil (2). The invention furthermore also relates to a machine and a method for removing dies from a foil carrier.