| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a microparticle pattern excellent in pattern controllability, pattern accuracy and productivity; and to provide a method for producing a single electron device, a magnetic recording medium, a chemical sensor, a quantum dot laser device or a photonic crystal optical device. <P>SOLUTION: The method for forming the microparticle pattern includes patternwise exposing a substrate 1 having a layer 5 formed on an uppermost surface thereof and containing a silane coupling agent having a thiol, amino, hydroxyl, carboxyl or sulfo group protected by a photodegradable protective group, and immersing the substrate in a colloidal solution in which metal atom-containing microparticles are dispersed to selectively deposit metal atom-containing microparticles 3 on an exposed portion 4. The method for producing a single electron device, a magnetic recording medium, a chemical sensor, a quantum dot laser device or a photonic crystal optical device using the microparticle pattern forming method is also provided. <P>COPYRIGHT: (C)2007,JPO&INPIT |
