| 摘要 |
A microelectromechanical sensor (30) has: at least one movable electrode (29), an electrode arrangement (311 to 314) which is at a distance from the movable electrode (29) and has a plurality of electrodes which can be driven separately and to which corresponding electrode signals (uo1, uo2, uu1, uu2 ) can be applied, wherein the electrode signals can be used to electrostatic ally set/change the application of force, the spring constant and the read-o ut factor of the movable electrode (29), an electrode signal generation unit (32) which is connected to the electrode arrangement (311 to 314) and can b e supplied with a force application signal (f), a spring constant signal (.D ELTA..omega.) and a read-out factor signal (m), which define the settings/ch anges which need to be made as regards the application of force, the spring constant and the read-out factor of the movable electrode (29), wherein the electrode signal generation unit (32) generates each electrode signal (uo1, uo2, Uu1, uu2) on the basis of the force application signal, the spring cons tant signal and the read-out factor signal (f, .DELTA..omega., m) and matche s the electrode signals to one another in such a manner that the application of force, the spring constant and the read-out factor of the movable electr ode (29) can be set/changed to particular desired values independently of on e another.
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