| 摘要 |
PROBLEM TO BE SOLVED: To realize a slider capable of desirably adjusting distribution of the pressure on a fluid bearing surface and capable of restricting deformation thereof when rising to the surface. SOLUTION: This slider, which moves by rising on a stage through a fluid bearing formed by injecting a fluid from the bottom surface to the stage, comprises a plurality of fluid openings formed in the bottom surface and a fluid adjusting means for separately adjusting the amount of the flow flowing out of the fluid openings. COPYRIGHT: (C)2009,JPO&INPIT
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