Laser oscillator provided with laser medium flow path

摘要

A laser oscillator which can keep distributions of pressure of a laser medium inside of a plurality of discharge tubes constant while making the laser medium circulate without stagnating. The laser oscillator is comprised of a first discharge tube, second discharge tube, first light guide, laser medium flow path, and blower. A flow resistance of a laser medium flow path between the blower and the first discharge tube and a flow resistance of the laser medium flow path between the blower and second discharge tube are the same as each other. A flow resistance of the laser medium flow path between the blower and a first end of the first light guide and a flow resistance of the laser medium flow path between the blower and a second end of the first light guide differ from each other.

主权项

1. A laser oscillator comprising:
a first discharge tube and a second discharge tube; a first light guide arranged between a first end of the first discharge tube and a first end of the second discharge tube; a laser medium flow path which is in fluid communication with each of the first discharge tube, the second discharge tube, and the first light guide; and a blower arranged in the laser medium flow path so as to circulate a laser medium to the laser medium flow path, the first discharge tube, and the second discharge tube, wherein a flow resistance of the laser medium flow path between a discharge opening of the blower and the first end of the first discharge tube is equal to a flow resistance of the laser medium flow path between the discharge opening and the first end of the second discharge tube, a flow resistance of the laser medium flow path between an intake opening of the blower and a second end of the first discharge tube opposite the first end of the first discharge tube is equal to a flow resistance of the laser medium flow path between the intake opening and a second end of the second discharge tube opposite the first end of the second discharge tube, and a flow resistance of the laser medium flow path between the discharge opening and a first end of the first light guide is different from a flow resistance of the laser medium flow path between the discharge opening and a second end of the first light guide opposite the first end of the first light guide.