发明名称 |
SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device and a manufacturing method of the same, which can avoid complication of a manufacturing process and reduce costs by forming a thin film transistor by using an oxide semiconductor film typified by zinc oxide.SOLUTION: In a semiconductor device formed by the steps of: forming a gate electrode on a substrate; forming a gate insulation film to cover the gate electrode; forming an oxide semiconductor film on the gate insulation film; and forming a first conductive film and a second conductive film on the oxide semiconductor film, the oxide semiconductor film has at least a crystallized region in a channel formation region.SELECTED DRAWING: Figure 1 |
申请公布号 |
JP2016131247(A) |
申请公布日期 |
2016.07.21 |
申请号 |
JP20160012156 |
申请日期 |
2016.01.26 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
AKIMOTO KENGO;HONDA TATSUYA;SONE HIROTO |
分类号 |
H01L29/786;G02F1/1368;H01L21/20;H01L21/336;H01L51/50;H05B33/02;H05B33/04 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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