发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and a manufacturing method of the same, which can avoid complication of a manufacturing process and reduce costs by forming a thin film transistor by using an oxide semiconductor film typified by zinc oxide.SOLUTION: In a semiconductor device formed by the steps of: forming a gate electrode on a substrate; forming a gate insulation film to cover the gate electrode; forming an oxide semiconductor film on the gate insulation film; and forming a first conductive film and a second conductive film on the oxide semiconductor film, the oxide semiconductor film has at least a crystallized region in a channel formation region.SELECTED DRAWING: Figure 1
申请公布号 JP2016131247(A) 申请公布日期 2016.07.21
申请号 JP20160012156 申请日期 2016.01.26
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 AKIMOTO KENGO;HONDA TATSUYA;SONE HIROTO
分类号 H01L29/786;G02F1/1368;H01L21/20;H01L21/336;H01L51/50;H05B33/02;H05B33/04 主分类号 H01L29/786
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