Pattern forming method, method for manufacturing electronic device, and electronic device

摘要

There is provided a pattern forming method containing: forming a film by using a radiation-sensitive or actinic ray-sensitive resin composition containing: (A) a onium salt compound containing a nitrogen atom in a cationic moiety; (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation; and (C) a resin capable of increasing the polarity by the action of an acid to decrease solubility in a developer containing an organic solvent, exposing the film; and developing the exposed film by using a developer containing an organic solvent to form a negative pattern.

主权项

1. A pattern forming method comprising:
forming a film by using a radiation-sensitive or actinic ray-sensitive resin composition containing: (A) an onium salt compound containing a nitrogen atom in a cationic moiety; (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation; and (C) a resin capable of increasing its polarity by the action of an acid to decrease solubility in a developer containing an organic solvent, exposing the film; and developing the exposed film by using a developer containing an organic solvent to form a negative pattern, wherein: the onium salt compound (A) is a compound having a basic moiety containing a nitrogen atom in the cationic moiety; an electron-withdrawn group is not directly connected to the nitrogen atom in the basic moiety; and the basic moiety is a structure selected from the group consisting of a group resulting from removal of one hydrogen atom from a primary amine, a group resulting from removal of one hydrogen atom from a secondary amine, and a nitrogen-containing heterocyclic group.