Acceleration sensor

摘要

An acceleration sensor where the accuracy of acceleration detection is unlikely to fall even when the ambient temperature changes. A piezoelectric substrate includes a polarized central portion and first and second end portions. A first electrode is formed on a first main surface of the piezoelectric substrate so as to extend from the first end portion to the second end portion. A second electrode is formed inside the piezoelectric substrate so as to extend across the second end portion and the central portion. The second electrode opposes the first electrode in the central portion in a thickness direction. A supporting member clamps the second end portion. The piezoelectric substrate is formed such that a distance between the first electrode and the second electrode in the second end portion is greater than a distance between the first electrode and the second electrode in the central portion.

主权项

1. An acceleration sensor comprising:
a piezoelectric element including:
a piezoelectric substrate having a central portion, a first end portion disposed on one side of the central portion, and a second end portion disposed on a second side of the central portion opposite the first side,a first electrode disposed on at least a first surface of the piezoelectric substrate and extending across the first end portion, the central portion and at least a portion of the second end portion, anda second electrode disposed inside the piezoelectric substrate and extending across the second end portion and at least a portion of the central portion; a supporting member configured to clamp at least a portion of the second end portion such that the central portion and the first end portion extend into an internal space of the supporting member; a first outer electrode disposed on a first surface of the supporting member and electrically connected to the first electrode; and a second outer electrode disposed on a second surface of the supporting member and electrically connected to the second electrode, wherein a distance between the first electrode and the second electrode in the second end portion of the piezoelectric substrate is greater than a distance between the first electrode and the second electrode in at least one of the central portion and the first end portion of the piezoelectric substrate.