| 摘要 |
PURPOSE: An electrostatic microactuator is provided to improve a performance of a driving and sensing structure by using electrostatic force. CONSTITUTION: In an electrostatic microactuator, anchors(24) are formed at both edges of a silicon substrate(1) on which an insulation thin film(2) is formed. An elastic suspension(24) is fixed at the anchors(24). A shuttle(21) is formed at one side of the elastic suspension(22). Driving sticks(23) are disposed at one side of the shuttle(21) in order to drive the shuttle and to sense a displacement of the shuttle. The driving sticks(23) are inserted in through holes formed so that both sides of a fixing electrode are penetrated(25).
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