SURFACE TREATMENT APPARATUS, AND SURFACE TREATMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a surface treatment apparatus and a surface treatment method capable of reducing refuse generated by the contact with an electrode, suppressing the deposition on the surface of the electrode and pollution inside the apparatus, and ensuring the consistency of the surface treatment.

SOLUTION: The surface treatment apparatus has a pair of electrodes which are arranged so as to form a discharge space with discharge faces opposing each other to generate the high frequency electric field in the discharge space. In addition, the surface treatment apparatus has a holding mechanism to hold a moving body so that the moving body can be moved relatively along at least one electrode out of the pair of electrodes in the discharge space. A lubrication layer is provided between at least one electrode and the moving body.

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