METHOD OF FORMING METAL LINE AND METHOD OF MANUFACTURING A DISPLAY SUBSTRATE BY USING THE SAME

摘要

A method of forming a metal line and a method of manufacturing a display substrate by using the same are provided to achieve low resistance and high definition of the display substrate, since an aluminum layer can be completely removed on the substrate. A method of forming a metal line comprises the steps of: successively depositing a low-resistance metal layer containing aluminum, and an upper layer containing molybdenum on a base substrate(101); forming a line-shaped photoresist pattern(140) on the upper layer; etching the upper layer with chlorinated compound gas containing one additional gas, by using the photoresist pattern as a mask; and etching the low-resistance metal layer by using the photoresist pattern as a mask.