发明名称 RECESSED OHMIC CONTACTS IN A III-N DEVICE
摘要 A device includes a III-N layer having an upper side and a lower side, the lower side being opposite the upper side, and at least one conductive contact on the upper side of the III-N layer, the conductive contact extending into the III-N layer. The conductive contact comprises a top side facing away from the lower side of the III-N layer, and a bottom side facing towards the lower side of the III-N layer. The bottom side includes a first end and a second end opposite the first end, a first side rising from the first end to an intermediate point closer to the top side than the first end, and a second side falling from the intermediate point to the second end further from the top side than the intermediate point.
申请公布号 US2016172455(A1) 申请公布日期 2016.06.16
申请号 US201414572670 申请日期 2014.12.16
申请人 Transphorm Inc. 发明人 Kikkawa Toshihide;Kiuchi Kenji;Hosoda Tsutomu;Kanamura Masahito;Mochizuki Akitoshi
分类号 H01L29/417;H01L29/20;H01L29/66;H01L21/308;H01L21/324;H01L29/778;H01L21/3065 主分类号 H01L29/417
代理机构 代理人
主权项 1. A device comprising: a III-N layer having an upper side and a lower side, the lower side being opposite the upper side; and at least one conductive contact on the upper side of the III-N layer, the conductive contact extending into the III-N layer, the conductive contact comprising: a top side facing away from the lower side of the III-N layer; anda bottom side facing towards the lower side of the III-N layer, the bottom side comprising: a first end and a second end opposite the first end;a first side rising from the first end to an intermediate point closer to the top side than the first end; anda second side falling from the intermediate point to the second end, the second end being further from the top side than the intermediate point.
地址 Goleta CA US