SUBSTRATE TRANSFER UNIT, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TREATING METHOD

摘要

A substrate transfer unit includes a rotation body, an arm member, and first and second blades. The arm member is on the rotation body, and the first and second blades are on the arm member. The arm member includes a first arm including a lower link on the rotation body and an upper link connected on one side of the lower link and a second arm including a first portion and a second portion. The first portion has a first pivot on the other side of the upper link and is connected with the first blade at a first height from the first pivot. The second portion is connected with the first portion and with the second blade at a second height, higher than the first height, from the first pivot.

主权项

1. A substrate transfer unit comprising:
a rotation body; an arm member on the rotation body, the arm member comprising a first arm and a second arm, the first arm including a lower link on the rotation body and an upper link connected on one side of the lower link and the second arm including a first portion and a second portion; and first and second blades on the arm member, the first portion having a first pivot on the other side of the upper link and being connected with the first blade at a first height from the first pivot, and the second portion being connected with the first portion and with the second blade at a second height, higher than the first height, from the first pivot.