| 摘要 |
PROBLEM TO BE SOLVED: To form a metal light-shielding film and a metal light-shielding wall with a high positional accuracy on a solid state image pick-up device.SOLUTION: The solid state image pick-up device includes: plural photoelectric conversion sections for generating an electric charge corresponding to incident light on each pixel; and a metal light-shielding film which is formed with being laminated on a silicon substrate on which the photoelectric conversion sections are formed as the boundary between the neighboring pixels. The metal light-shielding film is formed of a selective tungsten CVD. This disclosure is applicable, for example, to backside-illumination type CMOS image sensors.SELECTED DRAWING: Figure 6 |
