| 摘要 |
A B S T R A C T A method for structuring an object by means of at least one particle beam apparatus comprises: determining a test structure to be formed on a first object; determining first process parameters of the at least one particle beam apparatus; forming the test 5 structure on the first object using the first process parameters; determining an information structure to be formed on the first object, said information structure being assigned to the test structure and representing the first process parameters; forming the information 10 structure on the first object; determining a used structure to be formed on a second object; detecting the information structured formed on the first object; analysing the detected information structure and determining the first process parameters represented by 15 the detected information structure; determining process parameters on the basis of the determined first process parameters; and forming the used structure using said determined process parameters. 20 (Figure 1) |
