发明名称 Positioning device, method of applying a plurality of forces, method of positioning, lithographic apparatus and device manufacturing method.
摘要 A method of applying a plurality of forces to a physical component in response to an external force being applied to the physical component, wherein: - each respective one of the plurality of forces is being applied at a respective one of a plurality of predetermined different locations at the physical component; - the plurality of forces are higher in number than a minimum number needed to counteract a displacement of the physical component as a result of the external force and to counteract a change of orientation of the physical component as a result of the external force; - the method comprises applying the plurality of forces by: (i) controlling the plurality of forces so as to counteract the external force and achieve force equilibrium and moment equilibrium of the physical component; and (ii) controlling the plurality of forces so as to control an elastic deformation of the physical component at a region-of-interest at the physical component, the plurality of forces being controlled dependent on at least one of: a further location on the physical component at which the external force is being applied to the physical component, a magnitude of the external force, a direction of the external force and an estimated elastic deformation of the physical component at the region-of-interest, the elastic deformation occurring as a result of the plurality of forces and of the external force being applied.
申请公布号 NL2015342(A) 申请公布日期 2016.08.25
申请号 NL20152015342 申请日期 2015.08.25
申请人 ASML NETHERLANDS B.V. 发明人 NIC JASPER DIRKX;WILHELMUS HENRICUS THEODORUS MARIA AANGENENT;WILHELMUS FRANCISCUS JOHANNES SIMONS;MARINUS MARIA JOHANNES VAN DE WAL
分类号 G03F7/20 主分类号 G03F7/20
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