| 发明名称 |
Method and Apparatus for Electrostatic Mode-Alignment on Planar MEMS Gyroscopes |
| 摘要 |
A MEMS BAW vibratory planar gyroscope having an in-plane electrode configuration for mode-alignment by utilizing alignment electrodes that have a height less than a full height of the gyroscope resonant body. Such alignment electrodes apply a force component that affects modes with both in-plane and out-of-plane movements. The gyroscope includes a resonant body having a height and a perimeter surface and electrodes disposed adjacent the exterior perimeter surface of the resonant body. At least one of the electrodes is an alignment electrode and has a height less than the height of the resonant body. |
| 申请公布号 |
US2016349055(A1) |
申请公布日期 |
2016.12.01 |
| 申请号 |
US201615169033 |
申请日期 |
2016.05.31 |
| 申请人 |
Qualtre, Inc. |
发明人 |
Rahafrooz Amir;Serrano Diego Emilio;Jafri Ijaz |
| 分类号 |
G01C19/5719 |
主分类号 |
G01C19/5719 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus comprising:
a resonant body having a first height dimension value h1 and an exterior perimeter surface; and a plurality of electrodes disposed adjacent the exterior perimeter surface of the resonant body, wherein at least one of the plurality of electrodes is an alignment electrode and has a second height dimension value h2 that is less than the first height dimension value h1 of the resonant body. |
| 地址 |
Marlborough MA US |
