NFR SOLID IMMERSION LENZ HAVING BROAD MARGIN AND OBJECTIVE LENZ MANUFACTURING METHOD USING THEREOF

摘要

An SIL(Solid Immersion Lens) for a near field with a large margin and an optimized objective lens fabricating method according to the same are provided to have a broad margin insensitive to the generation of an aberration according to the thickness change of the SIL capable of being generated in a treatment and assemblage process. An SIL(115) of thickness with the minimum change rate of a spherical aberration is fabricated. An objective lens(107) for compensating the spherical aberration of the SIL(115) is fabricated. A size of the SIL is thicker than the thickness of a hemisphere SIL and is thinner than the thickness of a super hemispheral SIL.