DISPLAY SUBSTRATE, METHOD OF MANUFACTURING THEREOF AND DISPLAY APPARATUS HAVING THE SAME

摘要

A display substrate, a manufacturing method thereof and a display device having the same are provided to intercept outflow of impurities generated from an organic film such as a color filter by using an inorganic insulating film, thereby preventing pollution of LC(Liquid Crystal) and removing display faults such as afterimages. A TFT(Thin Film Transistor) layer(230) includes a gate line, a data line insulatingly crossing the gate line through a gate insulating film(234), a TFT connected with the gate line and the data line, and a storage electrode. A passivation film(240) covers the TFT layer. An organic film(300) is formed on the passivation film. An inorganic insulating film(400) is formed on the organic film through a low temperature deposition process of 100~250 degrees C. A pixel electrode(500) is formed on the inorganic insulating film, and connected with the TFT through contact holes(CNT) formed in the inorganic insulating film, the organic file and the passivation film.