OPTICAL SYSTEM MANUFACTURING METHOD

摘要

A projection optical system (PS) manufacturing method evaluates an optical performance of an entire system from approximate planes of all the optical planes in the projection optical system (PS) and changes at least one of the approximate planes of all the optical planes (such as a reduction side lens plane (S(L2s)) of a second lens L2 of an initial article referred to as "a change approximate plane") so as to obtain a change amount of tbe change approximate plane when optimal optical performance is obtained as the entire system. According to the change amount, a correction treatment amount for the cavity plane of a metal mold corresponding to the change approximate plane is obtained to perform correction treatment, thereby manufacturing a new cavity plane.