申请人 |
LAM RESEARCH CORPORATION;DORDI, YEZDI;REDEKER, FRITZ, C.;BOYD, JOHN;THIE, WILLIAM;ARUNAGIRI, TIRUCHIRAPALLI;HOWALD, ARTHUR, M.;YOON, HYUNGSUK, ALEXANDER;VERTOMMEN, JOHAN |
发明人 |
DORDI, YEZDI;REDEKER, FRITZ, C.;BOYD, JOHN;THIE, WILLIAM;ARUNAGIRI, TIRUCHIRAPALLI;HOWALD, ARTHUR, M.;YOON, HYUNGSUK, ALEXANDER;VERTOMMEN, JOHAN |