发明名称 CIRCUIT TRACING USING A FOCUSED ION BEAM
摘要 Described are various embodiments of methods and systems for tracing circuitry on integrated circuits using focused ion beam based imaging techniques. In one such embodiment, a method is provide for identifying functional componentry associated with a switchable power interface on an integrated circuit, wherein the switchable power interface comprises a source and a drain with a control switch therebetween, said control switch being controllable by a control signal during operation of the integrated circuit. The method comprises connecting, with deposited conductive material, the source and the drain; applying an external voltage bias to a power input of the switchable power interface via one of the source and the drain; exposing the integrated circuit to a focused ion beam; and gathering an image of the integrated circuit during exposure to determine areas of high contrast indicating functional componentry in operative connection with the switchable power interface.
申请公布号 CA2898767(A1) 申请公布日期 2017.01.28
申请号 CA20152898767 申请日期 2015.07.28
申请人 TECHINSIGHTS INC. 发明人 PAWLOWICZ, CHRISTOPHER;SORKIN, ALEXANDER;KRECHMER, ALEXANDER
分类号 G01R31/303;H01L21/66 主分类号 G01R31/303
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