| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method that allows easy miniaturization of a piezoelectric device, and a piezoelectric device. <P>SOLUTION: The piezoelectric device 1 comprises: a first electrode 5 formed on one surface of a substrate 3; a piezoelectric substance film 7, such as PZT, that is constituted of a piezoelectric material and is overlaid on the first electrode 5; and a second electrode 11 facing the first electrode 5 across the piezoelectric substance film 7. The method of manufacturing the piezoelectric device 1 comprises the steps of: forming a first dielectric film on the one surface of the substrate 3 where the first electrode 5 is formed and removing the first dielectric film to expose at least part of the first electrode 5; and filling a piezoelectric material into a region where the first dielectric film is removed to form the dielectric substance film 7 in the region. <P>COPYRIGHT: (C)2008,JPO&INPIT |
