| 摘要 |
Novel effective method of vacuum evaporation and followed deposition of transparent conductive oxides on the polymer basis allows achieve the high technical and operational parameters of ITO film: transparency, conductivity, a high adhesion to a polymer substrate (especially in limiting the temperature of deposition no more than 60° C.), resistance to thermal shock, thermal cycles, humidity, etc. and providing relatively low cost without the use of precious metals. The transparent conductive oxides which are obtained according presented invention is generally characterized by nano structures with the size of nano crystals from 6 nm up to 25 nm. wherein a nano structure is distributed evenly across the surface. The value of transparency of the transparent conductive oxides ITO that were received according presented invention was 92% when the value of surface resistance was 12 ohms/□. |
