发明名称 WORKPIECE PROCESSING CHAMBER HAVING A ROTARY MICROWAVE PLASMA ANTENNA WITH SLOTTED SPIRAL WAVEGUIDE
摘要 A microwave antenna includes a first spiral conduit having a first conduit end, first plural ports in a floor of the first spiral conduit spaced apart along the length of the first spiral conduit; an axial conduit coupled to a rotatable stage; and a distributor waveguide comprising an input coupled to the axial conduit and a first output coupled to the first conduit end.
申请公布号 WO2016111771(A1) 申请公布日期 2016.07.14
申请号 WO2015US63004 申请日期 2015.11.30
申请人 APPLIED MATERIALS, INC. 发明人 STOWELL, MICHAEL, W.
分类号 H01L21/205 主分类号 H01L21/205
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