发明名称 PIEZOELECTRIC OSCILLATION MEMBER AND PRODUCTION METHOD FOR SAME
摘要 The present invention increases the adhesive force that exists between a lid and an insulating adhesive layer and that is for hermetically sealing a piezoelectric oscillator on a substrate. A piezoelectric oscillation member (40) that is provided with: a substrate (10) that has a main surface (11) on which is mounted a piezoelectric oscillator (20); an insulating film (50) that is formed on the main surface (11); a lid (30) that has a recessed part (31) that opens to face the main surface (11), and that has an edge part (32) that is provided to the peripheral edge of the recessed part (31); and a first insulating adhesive layer (61) and a second insulating adhesive layer (62) that are provided between the lid (30) and the substrate (10). The first and second insulating adhesive layers (61, 62) are bonded between the edge part (32) and the insulating film (50) so as to hermetically seal the piezoelectric oscillator (20) in a space between the recessed part (31) and the main surface (11).
申请公布号 WO2016111047(A1) 申请公布日期 2016.07.14
申请号 WO2015JP75417 申请日期 2015.09.08
申请人 MURATA MANUFACTURING CO., LTD. 发明人 NOTO, KAZUYUKI;KAMI, KEIICHI;OISHIBASHI, HIDEKAZU
分类号 H03H9/02;H01L23/02;H01L23/10;H03H3/02 主分类号 H03H9/02
代理机构 代理人
主权项
地址