| 摘要 |
PROBLEM TO BE SOLVED: To provide a mold for imprint, an alignment method, an imprint method, and an imprint device which do not require a complicated process in manufacture of the mold, can directly and optically identify an aliment mark made of the same material as mold material, and can perform alignment with high alignment accuracy.SOLUTION: In step and repeat type imprinting, an alignment mark 4 on a mold side is formed in a mesa structure different from a transfer region 3 of a mold, and is aligned not with an alignment mark on a substrate side in a transferred region to be imprinted but with the alignment mark on the substrate side in another transferred region in contact with the transferred region.SELECTED DRAWING: Figure 1 |
