发明名称 |
THE METHOD FOR CONTROLLING THICKNESS OF HETEROSTRUCTURED IN-PLANE TRANSITION METAL CHALCOGENIDE THIN FILM |
摘要 |
The present invention relates to a method for controlling thickness of a heterostructured in-plane transition metal chalcogenide (TMC) thin film and an electrical element having a TMC thin film. According to a cooling step of the present invention, a border surface between a first TMC and a second TMC is clearly formed to be checked, and it is expected that the present invention can be usefully used in controlling band gap energy of the TMC material. |
申请公布号 |
KR101655898(B1) |
申请公布日期 |
2016.09.08 |
申请号 |
KR20150043567 |
申请日期 |
2015.03.27 |
申请人 |
INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY |
发明人 |
JU, SANG YONG;LEE, YONG GEUN |
分类号 |
C23C16/52;C23C16/06;C23C16/18;C23C16/44 |
主分类号 |
C23C16/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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