发明名称 THE METHOD FOR CONTROLLING THICKNESS OF HETEROSTRUCTURED IN-PLANE TRANSITION METAL CHALCOGENIDE THIN FILM
摘要 The present invention relates to a method for controlling thickness of a heterostructured in-plane transition metal chalcogenide (TMC) thin film and an electrical element having a TMC thin film. According to a cooling step of the present invention, a border surface between a first TMC and a second TMC is clearly formed to be checked, and it is expected that the present invention can be usefully used in controlling band gap energy of the TMC material.
申请公布号 KR101655898(B1) 申请公布日期 2016.09.08
申请号 KR20150043567 申请日期 2015.03.27
申请人 INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY 发明人 JU, SANG YONG;LEE, YONG GEUN
分类号 C23C16/52;C23C16/06;C23C16/18;C23C16/44 主分类号 C23C16/52
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