发明名称 フレキシブルデバイスの製造方法
摘要 A manufacturing method of a flexible device comprises: an adjustment step of adjusting adhesive characteristics of an adhesive layer formed over a supporting substrate; a temporary bonding step of temporarily bonding the flexible substrate; an electronic device formation step of forming an electronic device; and a separation step of separating the flexible substrate. In the adjustment step, the adhesive characteristics of the adhesive layer are adjusted to satisfy a relationship of PB<PA, where PA denotes a peel strength of the adhesive layer after the electronic device formation step, in a case where the adhesive layer undergoes the electronic device formation step without undergoing the adjustment step, and PB denotes a peel strength of the adhesive layer after the electronic device formation step, in a case where the adhesive layer undergoes the electronic device formation step after undergoing the adjustment step.
申请公布号 JP6002135(B2) 申请公布日期 2016.10.05
申请号 JP20130527857 申请日期 2012.07.24
申请人 パナソニック株式会社 发明人 田中 裕司;奥本 健二
分类号 G09F9/00;G09F9/30;H01L21/02;H01L21/336;H01L27/12;H01L27/32;H01L29/786;H01L51/50;H05B33/02;H05B33/10 主分类号 G09F9/00
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