CHARGED PARTICLE BEAM DEVICE AND CHARGED PARTICLE BEAM DEVICE CONTROL METHOD

摘要

This charged particle beam device (1) comprises: a stage driver (14) for driving a stage (13); a detector (16) for detecting charged particles released from a sample (SAMP); a first image transfer unit (20) for transferring a signal from the detector using a first image transfer protocol; a second image transfer unit (21) for transferring a signal from the detector using a second image transfer protocol; and a switch unit (23) for using the first image transfer unit or the second image transfer unit by switching therebetween on the basis of the state of the stage. The first image transfer protocol is more highly reliable than the second image transfer protocol, while the transfer speed by the second image transfer protocol is faster than by the first image transfer protocol. The use of a plurality of image transfer units by switching therebetween depending on the state of the stage improves communication fault-resistance and the ability to track stage movements.