发明名称 MEASURING METHOD AND INSTRUMENT, AND IMAGING METHOD AND DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To reduce calculation volume, and to precisely and stably measure the complex index of refraction. SOLUTION: Terahertz pulse light generated in a generation part 7 is transmitted through a measured object 20. The transmission light is detected by a detector 11 to obtain an amplitude transmittance of a prescribed frequency and a phase difference. The complex index of refraction of the measured object 20 is found by successive approximation based on an expression indicating the relation between the complex index of refraction of the measured object 20 and these quantities. Multiple reflection of the terahertz light inside the measured object is reflected in the expression. When an approximate solution of the complex index of refraction is provided to obtain a new approximate solution of the complex index of refraction in the successive approximation, a transmittance when the light is incident from a medium in the periphery of the measured object 20 on the object 20, a transmittance when the light outgoes from the measured object 20 to the medium, and a term based on the multiple reflection are processed as known quantities determined by the provided approximate solution to obtain the new approximate solution.</p>
申请公布号 JP2002277393(A) 申请公布日期 2002.09.25
申请号 JP20010074551 申请日期 2001.03.15
申请人 TOCHIGI NIKON CORP;NIKON CORP 发明人 USAMI MAMORU
分类号 G01N21/35;G01N21/3586;G01N21/41;G01N21/47;(IPC1-7):G01N21/35 主分类号 G01N21/35
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