发明名称 SINGLE CRYSTAL-PULLING DEVICE
摘要 PROBLEM TO BE SOLVED: To impart a degree of freedom suitable for recovering a quartz crucible to a divided carbon crucible, and to prevent damaging of the quartz crucible accompanying the degree of freedom. SOLUTION: A carbon crucible 10 is divided into two or more parts by parting lines 14 in a radial direction. An aperture 11a is established at the center of the bottom of the carbon crucible 10. A protruding part 21 which fits the aperture 11a is established on the crucible-carrying surface of a crucible- receiving plate 20. The inside diameter d2 of the aperture 11a is from 0.04 to 0.9 times as large as the inside diameter d1 of the straight body part of the carbon crucible 10, and the outside diameter D2 of the crucible-receiving plate 20 is >=0.5 times as large as the outside diameter D1 of the straight body part of the carbon crucible 10. The minimum wall thickness of the crucible- receiving plate 20 is >=15 mm.
申请公布号 JP2002274991(A) 申请公布日期 2002.09.25
申请号 JP20010076356 申请日期 2001.03.16
申请人 SUMITOMO MITSUBISHI SILICON CORP 发明人 KUBO TAKAYUKI;MAKIYAMA KATSUTO;KABURARUMA TATSUYA
分类号 C30B15/10;C30B29/06;(IPC1-7):C30B15/10 主分类号 C30B15/10
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