发明名称 METHOD AND DEVICE FOR PICKING UP PELLET
摘要 PROBLEM TO BE SOLVED: To efficiently pick up pellets on an expanded sheet, using means of a needleless pickup unit. SOLUTION: The method and device for radially expanding an elastic sheet 3 on the stage 1 of an expansion mechanism and picking up a plurality of pellets 5 on the sheet 3, sheet by sheet, by means of the oscillation arm 22 of a needleless pickup unit 20 has a function of imaging the pellet 5 on the sheet 3 by means of a camera 25 and processing the image signal at a control circuit section 30, and a function of supporting the oscillation arm 22 rotatably by 180°at an arm rotating section 40, where the oscillation arm 22 is appropriately inverted by 180°in a way of pellet pick-up operation, based on a control signal from the control circuit section 30, and the pellet pickup operation is sustained. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006156806(A) 申请公布日期 2006.06.15
申请号 JP20040346953 申请日期 2004.11.30
申请人 CANON MACHINERY INC 发明人 KITAMURA SHOJI;KOBAYASHI SHIGEKI
分类号 H01L21/67;H01L21/301;H01L21/52 主分类号 H01L21/67
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