| 摘要 |
A polishing pad forming apparatus and a method of manufacturing a polishing pad using the same are provided to form quickly easily an aiming groove type structure on the polishing pad by performing a molding process using an upper stage with a mold. A polishing pad forming apparatus includes a vacuum chamber(200), a lower stage, and an upper stage. The lower stage(210) is installed in the vacuum chamber in order to load a polymer film(220). The upper stage(240) is installed over the lower stage in the vacuum chamber. The upper stage includes a mold(230) capable of forming an aiming groove type structure on the polymer film. The lower and upper stages include a heat plate for performing a hot press process, respectively.
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