PROCESS FOR PRODUCING HIGH QUALITY PZT FILMS FOR FERROELECTRIC MEMORY INTEGRATED CIRCUITS,申请号KR20010052120-传众专利搜索

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发明名称	PROCESS FOR PRODUCING HIGH QUALITY PZT FILMS FOR FERROELECTRIC MEMORY INTEGRATED CIRCUITS
摘要
申请公布号	KR100753574(B1)	申请公布日期	2007.08.30
申请号	KR20010052120	申请日期	2001.08.28
申请人		发明人
分类号	H01L27/105;H01L21/02;H01L21/314;H01L21/316;H01L21/8246	主分类号	H01L27/105
代理机构		代理人
主权项
地址

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