| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a drilling apparatus, system and method that can accurately form a through hole having a diameter expanding from the surface to the inner wall face of a workpiece and that can surely prevent a laser beam from passing the formed through hole and damaging the inner wall face which the workpiece faces. <P>SOLUTION: The laser 10 for the drilling apparatus is composed of an optical wedge 42 that rotates around the revolving shaft to refracts a laser beam obliquely to the revolving shaft and a converging optical system 43 that converges the refracted laser beam to be emitted to a workpiece, wherein the optical wedge 42 and the converging optical system 43 are arranged inside one rotary body 4, so that the two are designed to rotate synchronously. Inside the rotary body 4, there is installed a plummet 44 for compensating eccentricity of weight. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
