发明名称 SUB-MICRON LASER DIRECT WRITE
摘要 A method of directing a pulse of laser energy though a workpiece. The workpiece has: a substrate that transmits the laser energy; focusing elements on a surface of the substrate proximal to the laser that focus the laser energy; and a coating on the substrate distal to the laser that absorbs a portion of the laser energy. Each focusing element focuses the laser energy to a point that removes or ablates a portion of the coating from the substrate to produce a hole in the coating.
申请公布号 WO2008157666(A1) 申请公布日期 2008.12.24
申请号 WO2008US67448 申请日期 2008.06.19
申请人 THE GOVERNMENT OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF THE NAVY;RINGEISEN, BRADLEY, R.;OTHON, CHRISTINA, M. 发明人 RINGEISEN, BRADLEY, R.;OTHON, CHRISTINA, M.
分类号 H01L21/44 主分类号 H01L21/44
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