| 摘要 |
PROBLEM TO BE SOLVED: To provide a boat type sample holder which can support a substrate having a warpage due to heat on a substrate mounting surface in a correct posture.SOLUTION: A sample holder comprises: a substrate plate in which a substrate mounting surface extends in a vertical direction, the substrate mounting surface having a rectangular mounting region defined therein and on which a substrate can be mounted; first, second, and third supports, which are arranged in a left hand side, right hand side, and bottom side of the mounting region respectively; and a fourth support that is arranged at a position facing the third support across a position where a center of gravity of a substrate mounted in the mounting region vertically extends to the bottom side of the mounting region. The substrate is supported with the first, second, third, and fourth supports, to be mounted on the substrate mounting surface. |
