| 摘要 |
The present invention relates to a deformable ring for generating a vacuum adsorption force while being deformed in the process of contacting a member to be adsorbed and a substrate adsorbing chuck comprising the same. The deformable ring according to the present invention comprises: an insertion base portion, which has an overall shape of a closed curve, and which is inserted and fixed in an installation groove; a buffering portion formed on the upper surface of the insertion base portion so as to stand upright; and a deformable portion, which is installed on the upper surface of the buffering portion at a predetermined installation angle with regard to the buffering portion, and which is made of an elastically deformable material. |
