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发明名称
SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号
KR100590174(B1)
申请公布日期
2006.06.14
申请号
KR20000037856
申请日期
2000.07.04
申请人
发明人
分类号
H01L21/027;G03F7/20;H01L21/00;H01L21/677;H01L21/68
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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