CRYOPUMP

摘要

A cryopump is provided to mount a plurality of low temperature arrays in a housing to carry out regeneration of adsorption substances in one of them and continue pumping work by the rest of them, thereby driving an operation chamber continuously without delay. A cryopump includes a housing(112), and at least two low temperature arrays(118) provided in the housing and having adsorption substances(120) such as active charcoal or zeolite for carrying out cyrocondensation and cryosorption for gas discharged from an operation chamber(100). A blocking plate(126) separates an inside of the housing into at least two spaces for separating the low temperature arrays from each other. A regeneration gas supply part(130) supplies regeneration gas to the spaces in the housing respectively for regenerating the adsorption substances.