| 摘要 |
A wafer transfer system is provided to restrain the contact between a transfer plate and a wafer by checking previously a leveling state between the transfer plate and the wafer using at least one leveling detecting sensor. A wafer transfer system includes a transfer arm, a driving unit, a control unit and a leveling detecting sensor. The transfer arm(210) includes a transfer plate for unloading a wafer from a wafer cassette. The driving unit(220) is used for driving the transfer arm. The control unit(230) is connected with the transfer arm and the driving unit in order to control the driving of the transfer arm. The leveling detecting sensor(240) is installed on the transfer arm in order to check a leveling state between the transfer plate and the wafer. The leveling detecting sensor is connected with the control unit.
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