MASKLESS EXPOSURE APPARATUS AND EXPOSURE METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To set a relative angle between a DMD (spatial optical modulator) and a substrate with high accuracy in an inexpensive configuration.

SOLUTION: A rotating table 13 the rotation center of which can be moved in XY directions is provided and a substrate 6 as an exposure object is mounted on the rotating table 13 and preliminarily rotated by a predetermined angle θ with respect to the Y axis prior to starting exposure. The substrate 6 in the rotated state is subjected to XY axes complementary control so as to draw a pattern on the substrate 6 by exposure by subjecting each mirror M of the DMD 3 to on-off control based on time-series exposure data while the substrate 6 is inclined in the direction of the angle.

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