发明名称 PROCESS FOR FABRICATING AN INTEGRATED ELECTRONIC CIRCUIT INCORPORATING A PROCESS REQUIRING A VOLTAGE THRESHOLD BETWEEN A METAL LAYER AND A SUBSTRATE
摘要 <p>A process for fabricating an electronic integrated circuit comprising a multi¬ layer interconnect stack. A structure (26), such as a MIM capacitor is formed by means of a process that requires the generation of a localized voltage across a nearby primary interconnect line (36) to the substrate. A secondary interconnect path (42) is provided which intersects with the primary interconnect line (36), which is removed after the structure (26) has been formed, so as to create an open circuit in the primary interconnect line (36). Thus, the performance of the circuit is enhanced.</p>
申请公布号 WO2008015640(A1) 申请公布日期 2008.02.07
申请号 WO2007IB53021 申请日期 2007.07.31
申请人 NXP B.V.;GOSSET, LAURENT, G. 发明人 GOSSET, LAURENT, G.
分类号 H01L21/68 主分类号 H01L21/68
代理机构 代理人
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