| 摘要 |
PROBLEM TO BE SOLVED: To enable the easy distinction between a grooving groove and a cut groove to identify them.SOLUTION: A cutting machine 10 comprises width-measuring means 20 for measuring the width of a grooving groove 5 formed in a wafer W by laser grooving, and the width of a cut groove 6 formed by a cutting blade 172. The width-measuring means 20 includes: an imaging camera 21 for taking an image of the grooving groove 5 and the cut groove 6; and illumination means 22 for casting a predetermined quantity of light on an imaging area 7 which the imaging camera 21 is to take an image of. Therefore, when the illumination means 22 is caused to emit first light, the imaging camera 21 can take a first shot image 100 where the grooving groove 5 is imaged clearly; when the illumination means 22 is caused to emit second light, the imaging camera 21 can take a second shot image 101 where the cut groove 6 is imaged clearly. Thus, it becomes possible to distinct between the grooving groove 5 and the cut groove 6 readily to identify them.SELECTED DRAWING: Figure 1 |
