发明名称 An SOI transistor having an embedded strain layer and a reduced floating body effect and a method for forming the same
摘要 By forming a portion (209A, 309A, 409A) of a PN junction (209, 309, 409) within strained silicon/germanium material (207, 307, 407) in SOI transistors (200, 300, 400) with a floating body (221, 321) architecture, the junction leakage may be significantly increased, thereby reducing floating body effects. The positioning of a portion (209A, 309A, 409A) of the PN junction (209, 309, 409) within the strained silicon/germanium material (207, 307, 407) may be accomplished on the basis of implantation and anneal techniques, contrary to conventional approaches in which in situ doped silicon/germanium is epitaxially grown so as to form the deep drain and source regions. Consequently, high drive current capability may be combined with a reduction of floating body effects.
申请公布号 GB2451369(A) 申请公布日期 2009.01.28
申请号 GB20080019286 申请日期 2007.03.29
申请人 ADVANCED MICRO DEVICES, INC 发明人 ANDY WEI;THORSTEN KAMMLER;JAN HOENTSCHEL;MANFRED HORSTMANN
分类号 H01L21/336;H01L29/10;H01L29/786 主分类号 H01L21/336
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