| 摘要 |
PROBLEM TO BE SOLVED: To easily and inexpensively manufacture a voltage driven mode magneto-optic spatial light modulator with which a pixel-determining element selected with an active matrix mode is accurately displayed at high speed. SOLUTION: The magneto-optic spatial light modulator which comprises a magneto-optic layer, a piezoelectric layer, and a thin film transistor circuit layer laminated with one another is manufactured. A first functional body comprising a PZT 16 polarized by disposing a YIG 12 on a garnet substrate 10, and laminating the piezoelectric layer composed of the PZT interposed between a common electrode 14 with a mirror function and an electrode 18 for polarization, and a second functional body comprising individual electrodes 24 for the respective pixel-determining elements and a thin film transistor circuit layer 26 laminated on a temporary substrate 20 via a sacrifice layer 22, and a substrate 30 for handling stuck thereto with a water-soluble adhesive film 28 are fabricated independently of each other. The electrode 18 for polarization of the first functional body is removed, the second functional body from which the temporary substrate has been removed is stuck thereto via a water-insoluble adhesive film 32, and the substrate 30 for handling is removed by dissolving the water-soluble adhesive film 28. COPYRIGHT: (C)2009,JPO&INPIT
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